Micro/ Nano Devices and Systems Laboratory
Location: Department of Electrical and Electronics Eng., Ground Floor EEM133
Laboratory Supervisors: Assoc. Prof. Dr. Feridun AY, Assoc. Prof. Dr. Nihan KOSKU PERKGÖZ, Res. Asst. Mustafa DEMİRTAŞ, Res. Asst. Hüseyin ŞAR
Laboratory Operation: Students who wants to work in the lab need to get in touch with supervisors to get permission.
Equipment List;
- Atomic Layer Deposition
- Micro-Raman
- FTIR
- Prism Coupler
- Profiler
- Microscope
- Glove Box
- Optic Table
- Fiber optic laser systems
Applications that can be done in the lab.;
The laboratory is divided into 2 sections. The first part is opto-electronic laboratory and the other is the class 100 cleanroom.
- Thin film growth
- Waveguide fabrication
- Transistor fabrication
- Refractive index measurement
- Devices thickness measurement
- Optic and electrical characterization
- Laser power measurement and polarization control
- Step high thickness measurement in nanometer scale
- Optic mode and loss measurement
- Fiber optic measurement systems
- Lithography processes