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ITN 522 - Introduction to Micro and Nano Fabrication

Instructor: Prof.Feridun AY
Teaching Assistants:
Course Book: Sami Franssila, “Introduction to Microfabrication”, Wiley, 2010
Grading: Midterm Exam: 30%; Final Exam: 40%; Homework Assignments & Presentations: 30%
Other Resources: Stephen A. Campbell, Fabrication Engineering at the Micro- and Nanoscale, Oxford Series in Electrical and Computer Engineering, 2012
Course Outline:
1. Week

Lecture 01 - Introduction and Motivation

 


2. Week

Lecture 02 - Cleanroom Environment, Safety and Processing Overview

Note: The lecture will start @ 09:30, (EEM Toplantı odası)

 


3. Week

Lecture 03 - Micrometrology and Materials Characterization

 


4. Week

Week 4-5: Silicon & Presentations round1

 


5. Week

DLW 1 - Silicon

 


6. Week

7. Week

DLW- Lecture Notes II

 


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